Full-chip CMP modelling based on Fully Convolutional Network leveraging White Light Interferometry

Jules Exbrayat, Renan Bouis, Elie Sezestre, Viorel Balan, Arnaud Cornelis, Damien Hebras

By Callan Zhang · May 6, 2026 · Editorial standards →

Summarised from the primary source with AI assistance under human editorial oversight. Turing Wire is not a primary source — read the original for the authoritative account.

Source: arXiv cs.LG